Specific maintenance of in-line plasma cleaners

Specific maintenance of in-line plasma cleaners:

1. Check the vacuum pump oil level and oil purity. Check the vacuum pump oil level and oil purity every month by observing the oil level window. When the oil level approaches the lowest red line mark, top up to between the upper and lower red oil lines; observe the oil color. Normal oil is clean and transparent. When the oil is turbid (the oil turns gray or the oil level window becomes blurred) and the vacuum pump makes abnormal noise, replace the vacuum pump oil promptly.

2. Clean the reaction chamber of the in-line plasma cleaner. First wipe the vacuum chamber with a degreased cotton cloth moistened with anhydrous ethanol (commonly known as alcohol) (do not wipe the reaction chamber viewing glass with ethanol). Second, introduce gas into the chamber (argon + oxygen or nitrogen + oxygen) and use the plasma reaction to remove residues in the chamber. Do this at least once a month, for about 10 minutes each time.

3. For the plasma cleaner, check the integrity of the plastic tubing and the vacuum seal, and self-check the integrity of the equipment. After thoroughly cleaning the reaction chamber, prevent contaminants from leaking into the chamber. Check whether the sealing strip on the reaction chamber door is loose. Check whether every gas line is securely connected and whether it has aged.

4. Check the power supply of the vacuum plasma cleaner to make sure the voltage matches the equipment.