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Awing plasma cleaning systems in this format.

Awing in-line plasma cleaning systemsAW-ZP in-line RF plasma cleanerAW-LP continuous RF plasma cleanerAW-ZMP in-line microwave plasma cleanerAW-P chamber RF plasma cleanerAW-DP desktop plasma cleanerAW-QP single-wafer plasma descum system
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AW-P Chamber RF Plasma Cleaner
AW-P Chamber RF Plasma Cleaner

Batch chamber RF plasma cleaner with multi-layer electrodes and adjustable spacing, stored recipes and full process control. Models P100, P135 and P170.

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AW-MP Chamber Microwave Plasma Cleaner
AW-MP Chamber Microwave Plasma Cleaner

Batch chamber 2.45 GHz microwave plasma cleaner with a rotating tray and ceramic microwave diffuser — no internal electrode, friendly to ESD-sensitive parts.

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AW-P00X R&D and Benchtop RF Plasma Cleaner
AW-P00X R&D and Benchtop RF Plasma Cleaner

Compact 13.56 MHz RF plasma cleaners for R&D lines, laboratories and low-volume production: the P006 R&D chamber and the P15 benchtop unit.

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