AW-ZP In-line RF Plasma Cleaner

In-line 13.56 MHz RF plasma cleaner built around lead-frame strips: automatic loading, UPH above 500 (ZP04B, IC) or about 800 (ZP04A, LED).

Email:awingtech@wxawing.com

Phone:+86 510 8359 5266

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Overview

Specifications

Applications

Overview+

The AW-ZP series cleans lead-frame strips in line with your packaging process. Automatic pick, transfer and delivery are designed around the lead frame, and the transfer handles strips of uneven stiffness without jamming. Choose the ZP04B for IC packaging or the ZP04A for LED packaging.

Features

Short cleaning time, without sputtering or high-temperature damage
Designed for lead frames, with automatic pick, transfer and delivery
Transfer structure that prevents jams and damage from strips of uneven stiffness
Automatic changeover for different incoming strips
Same-side or left-in / right-out loading, reducing handling and secondary contamination
Animated display of the whole line, with real-time process monitoring
Fault alarm that names the fault item and the station
Tiered parameter access for safer operation
Optional MES data transmission

Certification: CE certificate of conformity for the AW-ZP in-line series, including AW-ZP04B and AW-ZP04A (Low Voltage Directive 2014/35/EU, EMC Directive 2014/30/EU, Machinery Directive 2006/42/EC).

Specifications+

Parameter	AW-ZP04B	AW-ZP04A
Plasma source	13.56 MHz RF, automatic impedance matching
RF power	0–600 W / 1000 W, adjustable
Strip size	L 150–300 × W 30–100 mm	L 105–155 × W 30–80 mm
Throughput	4 lanes × 4 strips, UPH > 500	4 lanes × 8 strips, UPH ~800
Reaction chamber	L 550 × W 320 × H 50 mm, aluminum alloy	L 450 × W 350 × H 50 mm, aluminum alloy
Process gas	O₂ / Ar / H₂, mass-flow controlled, 0–200 mL/min
Control	Touchscreen + PLC, manual and automatic modes; optional industrial PC for MES connection
Dimensions	L 1700 × W 1100 × H 1950 mm, including signal tower
Target process	IC packaging	LED packaging