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Microwave

Awing plasma cleaning systems in this format.

Awing in-line plasma cleaning systemsAW-ZP in-line RF plasma cleanerAW-LP continuous RF plasma cleanerAW-ZMP in-line microwave plasma cleanerAW-P chamber RF plasma cleanerAW-DP desktop plasma cleanerAW-QP single-wafer plasma descum system
2 systems
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AW-ZMP In-line Microwave Plasma Cleaner
AW-ZMP In-line Microwave Plasma Cleaner

In-line 2.45 GHz microwave plasma cleaner for strips, with no internal electrode in the chamber — uniform, gentle cleaning without ESD issues.

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AW-MP Chamber Microwave Plasma Cleaner
AW-MP Chamber Microwave Plasma Cleaner

Batch chamber 2.45 GHz microwave plasma cleaner with a rotating tray and ceramic microwave diffuser — no internal electrode, friendly to ESD-sensitive parts.

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