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Awing plasma cleaning systems in this format.

Awing in-line plasma cleaning systemsAW-ZP in-line RF plasma cleanerAW-LP continuous RF plasma cleanerAW-ZMP in-line microwave plasma cleanerAW-P chamber RF plasma cleanerAW-DP desktop plasma cleanerAW-QP single-wafer plasma descum system
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AW-QP Single-Wafer Plasma Descum System
AW-QP Single-Wafer Plasma Descum System

Single-wafer plasma descum and photoresist strip for 4-, 6- and 8-inch wafers: quartz and aluminum chamber, 13.56 MHz RF, 30–160 °C temperature control.

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