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Awing plasma cleaning systems in this format.

Awing in-line plasma cleaning systemsAW-ZP in-line RF plasma cleanerAW-LP continuous RF plasma cleanerAW-ZMP in-line microwave plasma cleanerAW-P chamber RF plasma cleanerAW-DP desktop plasma cleanerAW-QP single-wafer plasma descum system
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AW-DP Desktop Plasma Cleaner
AW-DP Desktop Plasma Cleaner

Desktop 13.56 MHz RF plasma cleaner with a modular design, a choice of chambers and 1–5 electrode layers, storing 50 process recipes.

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